FAQ : Data Analysis

Q: How will Stone Pillar SuiteTM help me with my split lot data analysis?

A: Once a lot has been defined within Stone Pillar Suite, the experiment owner or others can check the status of available electrical test data from the resulting wafers. When the data has been measured and is made available within the system, it can immediately be loaded into Stone Pillar Suite DataAnalyzer. Stone Pillar Suite DataAnalyzer provides a high level of automation and report generation facilities. Stone Pillar Suite DataAnalyzer is tailored specifically to analysis of experimental split lots and make formatting plots and generating reports an easy, interactive operation. This tool was designed to the specification of Mixed Signal Device Design Engineers.

Q: Why makes the Split Lot Analysis capability better than the software I have, or have seen?

A: Generic statistical analysis packages allow the creation of valuable plots from data that can be input from a spreadsheet or simple data source. What distinguishes Stone Pillar Suite from these tools is the form of the data on which it operates. Stone Pillar Suite retains all relevant information regarding an experimental split lot such that you can access the experiment design, the layout, or a complete process flow from within the graphical tools of Stone Pillar Suite. Stone Pillar Suite DataAnalyzer enables real time visualization of your measured electrical parameters and allows you to quickly visualize the response of electrical measurements to experimental split parameter variations. For example, you can easily view plots of Vt versus L at W=20um, and see these plots for each experimental split or as an overlay distinguishing each split and allowing you to quickly determine the optimal experimental split, for experimental splits such as LDD Implant Dose.

Q: Can I cross check other forms of data during a split lot analysis?

A: Cross-referral of data objects is an underlying theme and a primary capability of Stone Pillar Suite. All data objects are contained within a single parametric model, related data objects may be called up interactively during the analysis for your reference. As examples, test structure layouts may be visualized during analysis. Similarly, published electrical design rules can be called up and updated directly from the analysis system. Electrical test routines, SPICE model comparisons, and process flow verifications are all designed into the over all system, leading to a very complete split lot analysis and cross reference capability.



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